Deposition apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10676813
APP PUB NO 20160326630A1
SERIAL NO

15211233

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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This invention provides a deposition apparatus which forms a film on a substrate, comprising: a rotation unit configured to rotate a target about a rotating axis; a striker configured to generate an arc discharge; a driving unit configured to drive the striker so as to make a close state which the striker closes to a side surface around the rotating axis of the target to generate the arc discharge; and a control unit configured to control rotation of the target by the rotation unit so as to change a facing position on the side surface of the target facing the striker in the close state.

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Patent Owner(s)

Patent OwnerAddress
CANON ANELVA CORPORATION2-5-1 KURIGI ASAO-KU KAWASAKI-SHI KANAGAWA-KEN 2158550

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Atsumi, Masahiro Fuchu, JP 8 45

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