METHOD TO CLEAN SURFACES EXPOSED TO PLASMA
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United States of America Patent
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Issued Date -
Nov 10, 2016
app pub date -
Jul 20, 2016
filing date -
Jun 30, 2009
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Abstract
Disclosed is a liquid cleaning mixture used to remove DMSO and other solvents and compounds that may build up on the surface of dielectric barrier material in a plasma cleaning device, where the DMSO, solvent and compounds have become contaminants.
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