SYSTEM AND A METHOD FOR AUTOMATIC RECIPE VALIDATION AND SELECTION
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United States of America Patent
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Jul 13, 2016
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Jul 6, 2009
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Abstract
A system, a non-transitory computer program product and a method for selecting an inspection recipe, the method includes: (i) obtaining an image of a structural element of the semiconductor device; (ii) calculating multiple types of distances between the image of the structural element and each of a plurality of reference images obtained by applying a plurality of inspection recipes; and (iii) automatically selecting at least one selected inspection recipe out of the plurality of inspection recipes based on values of the multiple types of distances.
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