Process for preparing octachlorotrisilane and higher polychlorosilanes with utilization of hexachlorodisilane

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United States of America Patent

PATENT NO 10023470
APP PUB NO 20160318768A1
SERIAL NO

15138044

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Abstract

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A controlled preparation of octachlorotrisilane and higher polychlorosilane such as DCTS and DCPS from monomeric chlorosilane, proceeds by exposing the chlorosilane to a nonthermal plasma and recycling chlorosilane that has not been converted to octachlorotrisilane into the plasma.

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EVONIK OPERATIONS GMBHRELLINGHAUSER STRASSE 1-11 ESSEN 45128

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brausch, Nicole Essen, DE 13 158
Lang, Juergen Erwin Karlsruhe, DE 28 91
Moussallem, Imad Hanau, DE 11 32
Rauleder, Hartwig Rheinfelden, DE 105 730
Trocha, Martin Essen, DE 13 264

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