WYθ table apparatus
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United States of America Patent
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Mar 20, 2018
Issued Date -
N/A
app pub date -
Dec 16, 2014
filing date -
Dec 17, 2013
priority date (Note) -
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Abstract
One first drive unit that advances or recedes in the X-direction and that exerts a drive force in the X-direction to a movable table is arranged to exert a drive force to a center position in the Y-direction of one end part in the X-direction of the movable table. Two second drive units that advance or recede in the Y-direction that is perpendicular to the X-direction, and that exert the drive forces in the Y-direction to the movable table are arranged to be point-symmetric with respect to the center of the movable table as the center of symmetry. Plural plane guide bearings are arranged at positions such that the total sum of the moment forces of the respective plane guide bearings is zero on the center axis line in the X-direction of the movable table.
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