Ga2O3 BASED CRYSTAL FILM FORMING METHOD, AND CRYSTAL LAMINATED STRUCTURE
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United States of America Patent
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Oct 27, 2016
app pub date -
Apr 22, 2016
filing date -
Apr 23, 2015
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Abstract
A Ga2O3 based crystal film forming method includes epitaxially growing a Ga2O3 based crystal film over a Ga2O3 based substrate. A growth temperature for the crystal film is not lower than 560 degrees Celsius. A VI/III ratio in an atmosphere adjacent to a growing surface when the crystal film is grown is smaller than ½, or greater than 2. A crystal laminated structure includes a Ga2O3 based substrate including a first group IV element, and a Ga2O3 based crystal film including a second group IV element, the crystal film being formed over the substrate, and having a surface roughness (RMS) of smaller than 1 nm, and a thickness of not smaller than 300 nm. A coefficient of variation of a concentration distribution of the second group IV element in a depth direction in the crystal film is not more than 20 percent.
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