NIOBIUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION OF NIOBIUM-CONTAINING FILMS
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United States of America Patent
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Issued Date -
Oct 20, 2016
app pub date -
Apr 15, 2016
filing date -
Apr 16, 2015
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Abstract
Niobium-containing film forming compositions are disclosed, along with methods of synthesizing the same, and methods of forming Niobium-containing films on one or more substrates via vapor deposition processes using the Niobium-containing film forming compositions.
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