VENTILATION GAS MANAGEMENT SYSTEMS AND PROCESSES
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United States of America Patent
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Oct 20, 2016
app pub date -
Jul 5, 2016
filing date -
Jan 14, 2010
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A ventilation gas management system and process for an enclosure adapted to contain fluid supply vessel(s) and through which ventilation gas is flowed to provide safe operation in the event of leakage of fluid from a vessel. Ventilation gas flow is modulated to accommodate various hazard levels associated with the deployment and operation of such enclosure containing fluid supply vessel(s), e.g., a gas box or gas cabinet in a semiconductor manufacturing facility, thereby achieving reduction in ventilation gas requirements otherwise required for such deployment and operation.
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