BULK ACOUSTIC WAVE RESONATOR AND FILTER INCLUDING THE SAME
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United States of America Patent
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Issued Date -
Oct 13, 2016
app pub date -
Jan 21, 2016
filing date -
Apr 10, 2015
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Abandoned
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Abstract
In examples, there is provided a bulk acoustic wave resonator including: a substrate, a first electrode and a second electrode formed on the substrate, and a piezoelectric layer formed between the first electrode and the second electrode, wherein at least one of the first electrode and the second electrode is formed of an alloy including a molybdenum element. Additionally, such a bulk acoustic wave resonator may include an air cavity formed between the substrate and the first electrode.
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