BULK ACOUSTIC WAVE RESONATOR AND FILTER INCLUDING THE SAME
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United States of America Patent
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N/A
Issued Date -
Oct 13, 2016
app pub date -
Jan 21, 2016
filing date -
Apr 10, 2015
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
In examples, there is provided a bulk acoustic wave resonator including: a substrate, a first electrode and a second electrode formed on the substrate, and a piezoelectric layer formed between the first electrode and the second electrode, wherein at least one of the first electrode and the second electrode is formed of an alloy including a molybdenum element. Additionally, such a bulk acoustic wave resonator may include an air cavity formed between the substrate and the first electrode.
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| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| CN | A | CN106059525 | Feb 22, 2016 |
| KR | A | KR20160148480 | Jun 15, 2016 |
| US | B2 | US10009007 | Jun 16, 2016 |
| CN | B | CN106257831 | Jun 16, 2016 |
| US | B2 | US10637436 | May 30, 2018 |
International Classification(s)
- 2016 Application Filing Year
- H01L Class
- 27971 Applications Filed
- 23507 Patents Issued To-Date
- 84.05 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- H01L Class
- 13.47 % this patent is cited more than
- 9 Age