THIN-FILM TRANSISTOR AND MANUFACTURING METHOD FOR SAME
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Oct 13, 2016
app pub date -
Aug 26, 2014
filing date -
Dec 2, 2013
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A manufacturing method for a thin-film transistor includes: forming an oxide semiconductor film above a substrate; forming a silicon film on the oxide semiconductor film; and performing plasma oxidation on the silicon film to (i) form an oxidized silicon film and (ii) supply oxygen to the oxide semiconductor film.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully