Dopant feeding device for dispensing dopant

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United States of America Patent

PATENT NO 10023973
SERIAL NO

14906462

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Abstract

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A dopant feeding device for releasing dopant into a feeder system during doping of a crystal growing system includes a dopant container for holding the dopant, a lower valve, and an upper valve. The dopant container includes a wall defining a lower opening for releasing the dopant therethrough. The lower valve is positioned adjacent to the lower opening and is movable between a closed position that is in contact with the wall to prevent passage of dopant through the lower opening and an open position that is spaced from the lower opening to allow passage of dopant therethrough. The upper valve is positioned above and connected to the lower valve. The upper valve is disposed within the dopant container and is movable between a first position that is spaced from the dopant container and a second position that is in contact with the dopant container.

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Patent Owner(s)

Patent OwnerAddress
GLOBALWAFERS CO LTDNO 8 INDUSTRIAL EAST ROAD 2 SCIENCE-BASED INDUSTRIAL PARK HSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dell'Amico, Gianni Merano, IT 3 8
Delpero, Ugo Marlengo, IT 1 5
Diodà, Mauro Bolzano, IT 6 13
Haringer, Stephan Castelbello/Ciardes, IT 24 62

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