SOFT-MAGNETIC BASED TARGETS HAVING IMPROVED PASS THROUGH FLUX
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United States of America Patent
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Oct 13, 2016
app pub date -
Apr 8, 2016
filing date -
Apr 10, 2015
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Abstract
Sputter targets and method of producing same having improved pass through flux (PTF). The targets may consist essentially of Fe—Co wherein the Co is predominantly hcp phase. The targets are prepared via powder precursors wherein at least the Co is made by a gas atomization process. This atomization process includes the steps of subjecting liquid Co to the action of dry argon gas and solidifying the liquid into small droplets. After the requisite powders have been sintered, they may be cold worked at temperatures of about 25-422° C.
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