Deposition apparatus
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United States of America Patent
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May 1, 2018
Issued Date -
N/A
app pub date -
Dec 17, 2015
filing date -
Apr 10, 2015
priority date (Note) -
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Abstract
A deposition apparatus including a crucible to receive the deposition material and in which a deposition material is evaporated; a linear deposition source having a sprayer to spray the evaporated deposition material; a first connection portion and a second connection portion spaced apart from each other by a predetermined interval, the first connection portion and the second connection portion connecting the linear deposition source to the crucible at an upper surface of the crucible; and a heater in the crucible to apply heat to the deposition material, wherein the upper surface of the crucible has a first convex portion and a second convex portion successively formed between the first connection portion and the second connection portion.
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