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United States of America Patent

APP PUB NO 20160296902A1
SERIAL NO

15185658

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Methods and systems for high precision, continuous blending of mixtures, and particularly mixtures having at least two distinct chemical components, are disclosed. More particularly, the disclosed methods and systems provide high precision, continuous blending of buffered oxide etch mixtures containing water, ammonium fluoride, and hydrofluoric acid.

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Patent Owner(s)

Patent OwnerAddress
AIR LIQUIDE ELECTRONICS U S LP2700 POST OAK BLVD SUITE 1800 HOUSTON TX 77056

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
O'DOUGHERTY, Kevin T Arden Hills, US 40 933

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