Boron-containing compounds, compositions, and methods for the deposition of a boron containing films

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United States of America Patent

PATENT NO 10763103
APP PUB NO 20160293410A1
SERIAL NO

15079585

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Abstract

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Described herein are boron-containing precursor compounds, and compositions and methods comprising same, for forming boron-containing films. In one aspect, the film is deposited from at least one precursor having the following Formula I or II described herein.

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Patent Owner(s)

Patent OwnerAddress
VERSUM MATERIALS US LLC8555 SOUTH RIVER PARKWAY TEMPE AS 85284

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Moo-Sung Gyunggi-do, KR 77 2452
Lei, Xinjian Vista, US 203 13409

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