CONTROL METHOD FOR THE ACCERLATION OF A VACUUM PUMP, IN WHICH METHOD THE INPUT CURRENT OF THE CONTROL DEVICE IS LIMITED
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United States of America Patent
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Issued Date -
Oct 6, 2016
app pub date -
Nov 13, 2014
filing date -
Nov 14, 2013
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Abstract
A control method for an acceleration of a vacuum pump, in particular a turbomolecular pump, having an electric motor and a control device in which, in a first acceleration phase, the input current of the control device increases up to a maximum value Is,max and, in a second acceleration phase, the control device is operated at the maximum value Is,max of the input current.
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