HYDROXIDE FACILITATED OPTICAL FILMS

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United States of America Patent

APP PUB NO 20160289819A1
SERIAL NO

14677699

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Methods of lowering the absorption losses of optical coatings at wavelengths shorter than 350 nm. During a deposition process of a metal oxide optical coating, dissociated hydroxide ion is added to the deposition process. The hydroxide ion source can be, for example, water vapor. By adding the hydroxide ion, a decrease in impurities and defects/dislocations in the optical coating is achieved.

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Patent Owner(s)

Patent OwnerAddress
VEECO INSTRUMENTS INC1 TERMINAL DRIVE PLAINVIEW NY 11803

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lyngnes, Ove Fort Collins, US 20 49
Rubin, Binyamin Smithtown, US 5 7

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