ELECTROCHEMICAL REACTION APPARATUS
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United States of America Patent
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Issued Date -
Sep 29, 2016
app pub date -
Sep 16, 2015
filing date -
Sep 16, 2015
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Abstract
An electrochemical reactor includes an adjustable electric field shaping capability during electroplating. The electrochemical reactor includes a reservoir configured to retain an electrolytic solution; a cathode and an anode disposed in the reservoir to form electric field lines passing through the electrolytic solution. Either the cathode or the anode includes a workpiece holder. A shield attaches to the cathode or the anode without the workpiece holder. The shield includes a surface configured to block a portion of the electric field lines, and a conduit positioned on the surface and configured to concentrate the electric field lines within the conduit. The conduit includes a protruding portion including a height measured from the surface to a top surface of the conduit, and an aperture penetrating the protruding portion and passing through the surface. The aperture is configured to allow the electric field lines to pass through the conduit.
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