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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CALIFORNIA INSTITUTE OF TECHNOLOGY	1200 E CALIFORNIA BLVD M/C 6-32 PASADENA CA 91125

International Classification(s)

• B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
• B81B:MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-ME....
• B01J:CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, CO....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
HENRY, Michael D	ALTADENA, US	30	330
HOMYK, Andrew P	SOUTH PASADENA, US	22	265
SCHERER, Axel	BARNARD, US	328	8232
TOMBRELLO, Thomas A	ALTADENA, US	27	552
WALAVALKAR, Sameer	STUDIO CITY, US	31	308

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Mar 29, 2028

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2016/0280,537

METHODS FOR FABRICATING HIGH ASPECT RATIO PROBES AND DEFORMING HIGH ASPECT RATIO NANOPILLARS AND MICROPILLARS

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