MEMS-BASED SPEAKER IMPLEMENTATION
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United States of America Patent
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Issued Date -
Sep 22, 2016
app pub date -
Mar 16, 2016
filing date -
Mar 16, 2016
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Abstract
A micro-electromechanical system (MEMS) device that comprises a substrate, support structures, functional elements and conductive paths that comprise conductive elements; wherein the functional elements are included in a plurality of functional layers, the plurality of functional layers are spaced apart from each other; wherein the support structures are configured to provide structural support to the plurality of functional layers; wherein each functional layer is coupled to a conducting interface via a conductive path that is associated with the functional layer; and wherein the support structures comprise lateral etch stop elements.
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