MULTI-LAYERED MEMS SPEAKER
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Mar 17, 2016
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Mar 17, 2015
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Abstract
A micro-electromechanical system (MEMS) device that may include a substrate, support structures and functional elements; wherein the functional elements are included in a plurality of functional layers, the plurality of functional layers are spaced apart from each other; wherein the support structures are conductive and are configured to provide structural support to the plurality of functional layers; wherein each functional element is electrically coupled to at least one of the support structures; and wherein the support structures are spaced apart from each other.
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