BIOSENSOR STRUCTURE, METHOD OF FABRICATING THE SAME AND BIOLOGICAL DETECTION SYSTEM
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United States of America Patent
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app pub date -
Mar 20, 2015
filing date -
Mar 20, 2015
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Abstract
A biosensor structure is provided, which includes a substrate, a center conductor, a first ground conductor, a second ground conductor and a protection layer. The center conductor is disposed on the substrate and defines a detection area at the central area thereof for detection of cells or biomolecules. The first ground conductor is disposed on the substrate and is located opposite to a side of the center conductor. The second ground conductor is disposed on the substrate and is located opposite to another side of the center conductor. The protection layer is disposed on the substrate, the center conductor, the first ground conductor and the second ground conductor. In a thickness direction of the biosensor structure, the protection layer is disposed without substantially overlapping the detection area.
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