SYSTEM FOR RELATIVE MOVEMENT BETWEEN TWO PLATES AND POSITIONING DEVICE COMPRISING SUCH A MOVEMENT SYSTEM
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United States of America Patent
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N/A
Issued Date -
Sep 22, 2016
app pub date -
Mar 16, 2016
filing date -
Mar 16, 2015
priority date (Note) -
Published
status (Latency Note)
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Abstract
A system provides for relative movement between two plates that are substantially parallel to a plane defined by a first direction and a second direction. The system includes a first unit that is configured to allow a relative movement between the two plates in a third direction that is orthogonal to the plane. The first unit also independently prevents a relative movement between the two plates in the plane. The system further includes a second unit that is configured to allow one plate to relatively travel with respect to the other plate about the first and second directions.
First Claim
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