SUBSTRATE FLOATING APPARATUS, SUBSTRATE TRANSFER APPRATUS, AND SUBSTRATE TRANSPORT APPARATUS
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United States of America Patent
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Issued Date -
Sep 15, 2016
app pub date -
Oct 6, 2014
filing date -
Nov 13, 2013
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Abstract
Provided are a substrate floating apparatus, substrate transfer apparatus, and substrate transport apparatus that achieve energy savings, the saving of space, maintenance-free operation, low costs and an increase in controllability of airflow. The substrate floating apparatus according to the present invention floats a substrate above a placing surface by jetting air from a plurality of jetting ports, and includes: a plate having a surface that is the placing surface and including the plurality of jetting ports penetrating the plate in a thickness direction and spaced apart from one another at a given interval; a plurality of air blowers that blow air toward the plurality of jetting ports from a rear side of the plate by vibrating a diaphragm; and a controller that controls driving of the plurality of air blowers.
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