DETECTING THICKNESS VARIATION AND QUANTITATIVE DEPTH UTILIZING SCANNING ELECTRON MICROSCOPY WITH A SURFACE PROFILER
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United States of America Patent
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May 25, 2016
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Jun 20, 2014
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Abstract
A method and system to detect thickness variation of a subject material are described. In an aspect, tribological wear is assessed for a disk drive memory system at the pole tip region of a magnetic head. Images are obtained of a first region and a second region of a subject material utilizing scanning electron microscopy (SEM). The SEM images are image processed to obtain a differential contrast between the first region and the second region. An image intensity variation is determined between masked SEM images of the first region and the second region by obtaining a surface profiler image of the first region and the second region, and overlaying and calibrating the SEM images with the surface profiler images. In an aspect, image intensity variation is converted to quantified thickness utilizing a fitted relation obtained from the calibration of the surface profiler images with the SEM images.
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