DOOR OPENING AND CLOSING APPARATUS, TRANSFER APPARATUS, AND STORAGE CONTAINER OPENING METHOD
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United States of America Patent
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Issued Date -
Sep 8, 2016
app pub date -
Mar 1, 2016
filing date -
Mar 6, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A door opening and closing apparatus includes: a frame that structures part of a wall surface of a transfer room and is provided with an opening for opening the transfer room; a door part capable of opening and closing the opening: a placing pedestal on which a storage container can be placed; a chamber provided at a position on the transfer room side so as to face the opening, and having an inner space to be subjected to a purge process with an environmental gas; and a pressure adjusting part causing the inner space of the chamber and the inner space of the storage container to communicate with each other using a route other than the opening. The door opening and closing apparatus can be applied to a wafer transfer apparatus or the like.
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