REAGENT FOR ENHANCING GENERATION OF CHEMICAL SPECIES AND MANUFACTURING APPARATUS

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United States of America Patent

APP PUB NO 20160259245A1
SERIAL NO

15027855

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.

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Patent Owner(s)

Patent OwnerAddress
TOYO GOSEI CO LTD1603 KAMIMYODEN ICHIKAWA-SHI CHIBA 2720012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Enomoto, Satoshi Ichikawa-shi, Chiba, JP 55 178
Miyazawa, Takashi Inzai-shi, Chiba, JP 169 2753

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