Material property measurements using multiple frequency atomic force microscopy

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United States of America Patent

PATENT NO 10215773
APP PUB NO 20160258980A1
SERIAL NO

15064405

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Abstract

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Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.

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Patent Owner(s)

Patent OwnerAddress
OXFORD INSTRUMENTS ASYLUM RESEARCH INC6310 HOLLISTER AVENUE GOLETA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Callahan, Roger Goleta, US 2 3
Proksch, Roger Santa Barbara, US 57 377

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