OPTICAL METHOD FOR MONITORING PLASMA DISCHARGING GLOW
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United States of America Patent
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Issued Date -
Sep 8, 2016
app pub date -
Sep 9, 2015
filing date -
Mar 4, 2015
priority date (Note) -
Published
status (Latency Note)
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Abstract
An optical method for monitoring plasma discharging glow is described, which includes the following steps. Plasma discharging glow is detected to obtain various optical signals using a detector. The optical signals are captured and converted into various electric signals by using a sensing circuit. A calculation step is performed according to the electric signals to obtain various light intensities corresponding to various locations in the plasma discharging glow using an arithmetic unit. An image of the plasma discharging glow is reconstructed according to the locations in the plasma discharging glow and the corresponding light intensities using an image reconstruction unit.
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Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| TW | A | TW201632866 | Mar 04, 2015 |
| CN | A | CN105938103 | Dec 10, 2015 |
International Classification(s)
- 2015 Application Filing Year
- G01J Class
- 1516 Applications Filed
- 1256 Patents Issued To-Date
- 82.85 % Issued To-Date
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- 0 Citation Count
- G01J Class
- 0 % this patent is cited more than
- 9 Age