SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND POWER CONVERSION DEVICE

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United States of America Patent

APP PUB NO 20160254761A1
SERIAL NO

15051822

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A semiconductor device includes a semiconductor substrate in which a semiconductor element is formed, an electrode structure of a first semiconductor chip which is provided on a first surface of an n+-type semiconductor layer of the semiconductor substrate to be electrically connected to the semiconductor element and in which a first Al metal layer composed of Al or Al alloy, a Cu diffusion-prevention layer, a second Al metal layer composed of Al or Al alloy, and a Ni layer are formed in this order, and a conductive member which is bonded to the electrode structure of the first semiconductor chip via a sintered copper layer disposed on a surface of the Ni layer. In this semiconductor device, a crystal plane orientation of Al crystal grains on a surface of the second Al metal layer is principally on (110) plane.

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Patent Owner(s)

Patent OwnerAddress
HITACHI POWER SEMICONDUCTOR DEVICE LTD2-2 OMIKA-CHO 5-CHOME HITACHI-SHI IBARAKI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
FURUKAWA, Tomoyasu Tokyo, JP 17 31
MORITA, Toshiaki Tokyo, JP 103 1457
NAKANO, Hiroshi Tokyo, JP 377 4094
SHIRAISHI, Masaki Tokyo, JP 106 1465

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