Wet Method for the Production of Thin Films
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United States of America Patent
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Sep 1, 2016
app pub date -
Oct 31, 2014
filing date -
Oct 31, 2013
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Abstract
A method produces thin films. The method includes preparing a solution containing transition metal oxide precursors, a chelating agent, and a polar organic solvent. The solution is agitated to form a sol. The sol is used in the form of the transition metal oxide film. The chelating agent is selected from among di- or tri-aliphatic carboxylic acids, or salts or mixtures thereof. The polar organic solvent has a boiling temperature at atmospheric pressure of less than 150° C.
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