Mass Air Flow Measurement Device
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United States of America Patent
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Issued Date -
Sep 1, 2016
app pub date -
Sep 5, 2014
filing date -
Oct 31, 2013
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Abstract
In order provide a mass air flow measurement device capable of enhancing contamination resistance of a humidity sensing element and achieving highly accurate air flow sensing, the mass air flow measurement device includes an air flow sensing element that senses air flow, a physical quantity sensing element that senses at least one of humidity and pressure, and a circuit package incorporating a circuit that processes an output signal of the air flow sensing element and an output signal of the physical quantity sensing element. The air flow sensing element and the physical quantity sensing element are arranged within the same circuit package.
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