MULTI-SOURCE GIS FOR PARTICLE-OPTICAL APPARATUS
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United States of America Patent
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Aug 25, 2016
app pub date -
Feb 24, 2016
filing date -
Feb 25, 2015
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Abstract
A Gas Injection System (GIS) applies at least two fluids in the vacuum chamber of a particle-optical apparatus, the gas injection system having two or more channels. Each channel is connected to an associated reservoir holding a fluid at a first side and having an associated exit opening at the other side, the exit sides individually exiting to the outside of the GIS via a nozzle with a nozzle opening. At least two exit openings separated by less than the diameter of the channels near the exit openings, preferably concentric to each other.
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