Multi-Value Nonvolatile Organic Resistive Random Access Memory and Method for Preparing the Same

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United States of America Patent

APP PUB NO 20160240778A1
SERIAL NO

15024996

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Disclosed are a multi-value nonvolatile organic resistive random access memory and a method for preparing the same. The resistive random access memory comprises a top electrode, a bottom electrode and a middle functional layer located between the top electrode and the bottom electrode, the middle functional layer is at least two layers of parylene. The method comprises the steps of: growing material for the bottom electrode using physical vapor deposition method on a substrate; growing sequentially multiple layers of parylene on the bottom electrode by polymer chemical vapor deposition; defining the via for leading out the bottom electrode by lithography and etching; growing material for the top electrode on the parylene materials by using physical vapor deposition process, defining the top electrode material by lithography and lift-off, and leading out the bottom electrode.

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Patent Owner(s)

Patent OwnerAddress
PEKING UNIVERSITY100871 NO 5 THE SUMMER PALACE ROAD BEIJING HAIDIAN DISTRICT BEIJING CITY BEIJING CITY 100871

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cai, Yimao Beijing, CN 26 81
Fang, Yichen Beijing, CN 12 11
Huang, Ru Beijing, CN 100 354
Li, Qiang Beijing, CN 872 12045
Liu, Yefan Beijing, CN 2 1
Pan, Yue Beijing, CN 107 1293
Wang, Zongwei Beijing, CN 15 34
Yu, Muxi Beijing, CN 4 8

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