Device and method for aligning substrates

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United States of America Patent

PATENT NO 9851645
SERIAL NO

14396995

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Abstract

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A method for aligning and bringing a first substrate into contact with a second substrate as well as a corresponding device with at least four detection units wherein:

    at least two first detection units can move at least in the X-direction and in the Y-direction, andat least two second detection units can move exclusively in the Z-direction.

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Patent Owner(s)

Patent OwnerAddress
EV GROUP E THALLNER GMBHDI ERICH THALLNER STRASSE 1 ST FLORIAN AM INN A-4782

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wagenleitner, Thomas Aurolzmunster, AT 51 647

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