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United States of America Patent
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Issued Date -
Aug 18, 2016
app pub date -
Oct 23, 2014
filing date -
Oct 24, 2013
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Abstract
A method and a device for carrying out the method for processing surfaces of workpieces, preferably of large substrates, are presented. The intent is to arrange the processing devices on the casing of a drum-type carrier in a vacuum chamber. The workpiece is transported over the drum and optionally made to rotate. The drum-type carriers is rotated in such a way that the intended processing device is turned towards the workpiece and can process it. The surface section to be processed can be selected via translation and rotation.
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