VERTICAL WAFER BOAT
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United States of America Patent
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Issued Date -
Aug 11, 2016
app pub date -
Feb 10, 2016
filing date -
Feb 10, 2015
priority date (Note) -
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Abstract
Provided is a vertical wafer boat with columns having a rectangular cross section, and capable of making a flow of a film-forming gas between wafer support portions more uniform, suppressing variation in the film thickness in a wafer plane, and forming a more uniform film. A vertical wafer boat includes columns on which wafer support portions for mounting a plurality of wafers are formed, and a top plate and a bottom plate that fix upper and lower end portions of the columns. At least one of the columns includes two column portions and extending in an up and down direction and having a rectangular cross section, and a plurality of the wafer support portions that connects the two column portions and mounts wafers on upper surfaces.
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