Apparatus and Method for Metastable Enhanced Plasma Ignition
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United States of America Patent
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Aug 11, 2016
app pub date -
Feb 6, 2015
filing date -
Feb 6, 2015
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Abstract
Methods and apparatus for igniting a process plasma within a plasma chamber are provided. A quantity of metastable atoms generated within a metastable generation volume are provided along with an ignition gas to a plasma generation volume defined by a plasma chamber. The quantity of metastable atoms generated is sufficient to allow at least a predetermined quantity of the metastable atoms to flow from a first location within the plasma generation volume to a second location within the plasma generation volume. A process plasma is ignited within the plasma generation volume by applying an electric field to the plasma generation volume that includes the metastable atoms flowed therein.
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