APPARATUS AND METHOD TO CONFIRM CLEANING AND MEASURE CLEANING EFFECTIVENESS WITH NEAR-INFRARED SPECTROPHOTOMETER
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United States of America Patent
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Aug 11, 2016
app pub date -
Feb 5, 2016
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Feb 6, 2015
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Abstract
An apparatus and method to clean a substrate and to verify an effectiveness of the cleaning is disclosed. The method includes scanning substrate to generate a pre-cleaning data by using a first mechanism; cleaning substrate by using a second mechanism; scanning substrate to generate a post-cleaning data by using the first mechanism; and generating at least one contamination characteristic based on a comparison between the pre-cleaning data and the post-cleaning data. The contamination characteristic is analyzed for evidence of a contaminant in order to verify effectiveness of the cleaning. Process parameters may be adjusted based upon feedback from the effectiveness of the cleaning.
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