SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
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United States of America Patent
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Aug 11, 2016
app pub date -
Mar 10, 2015
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Feb 6, 2015
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Abstract
A semiconductor structure and a method for manufacturing the same are provided. The semiconductor structure comprises a base substrate and a MEMS structure. The base substrate comprises a CMOS structure. The MEMS structure is formed on the base substrate adjacent to the CMOS structure. The MEMS structure is connected to the CMOS structure. The MEMS structure comprises a membrane and a backplate. The base substrate has a cavity corresponding to the MEMS structure.
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