Optimized textured surfaces and methods of optimizing

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United States of America Patent

PATENT NO 10792788
APP PUB NO 20160229029A1
SERIAL NO

15029674

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Abstract

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Methods for treating texturized surfaces of sputter targets in order to improve adhesion and retention of deposited particles thereon. The target surfaces may first be texturized by a precursor texturizing method such as bead blasting, grit blasting, plasma spraying, or a twin-wire-arc spraying (TWAS) method. The thus textured surface is then sprayed or blasted with ice particles to form an optimized textured surface. The ice particles may comprise sublimable particles such as frozen carbon dioxide or dry ice. Also, argon may be used as exemplary ice particles.

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Patent Owner(s)

Patent OwnerAddress
TOSOH SMD INC3600 GANTZ ROAD GROVE CITY OH 43123

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Buckfeller, Joseph W Powell, US 8 468
Holeman, John Powell, US 1 0
Reed, Justin K Reynoldsburg, US 7 41
Smathers, David B Columbus, US 41 246

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