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Abstract

To provide a formic acid decomposition apparatus and method, which can dispose of formic acid safely and quickly and determine the activity of a filled catalyst. The apparatus is for decomposing formic acid contained in exhaust gas exhausted from a soldering apparatus in which a surface oxide film is reduced with formic acid, into water and carbon dioxide. The apparatus has a formic acid decomposition part in which a formic acid decomposition catalyst is filled; a gas introduction pipe for introducing gas containing formic acid into the decomposition part; and a gas introduction unit for introducing oxygen or gas containing oxygen into the decomposition part. In the apparatus, the activity of the catalyst is determined on the basis of an amount of change of a catalyst temperature by heat generation during a decomposition reaction of formic acid. The method includes mixing exhaust gas containing formic acid exhausted from the soldering apparatus, and oxygen or gas containing oxygen such that a molar ratio of formic acid and oxygen (oxygen/formic acid) is 1.5 or more, and allowing the mixed gas to react in the presence of the catalyst to decompose formic acid into water and carbon dioxide.

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First Claim