HERMETICALLY SEALED THROUGH VIAS (TVS)
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United States of America Patent
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Jul 28, 2016
app pub date -
Jan 28, 2016
filing date -
Jan 28, 2015
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Abstract
Hermetically sealed through vias (TVs) are disclosed. In one aspect, an hourglass TV is first created in a substrate. The hourglass TV has a waist opening. A conductive conformal coating covers at least a portion of an interior wall of the hourglass TV. The conductive conformal coating also completely fills the waist opening to provide a hermetic seal between an upper opening and a lower opening of the hourglass TV, thus creating the hermetically sealed TV. The combination of the hourglass shape, which provides a narrowing waist, and using the conformal coating process, facilitates the natural accumulation of the conductive conformal coating material in and about the waist opening. Creating hermetically sealed TVs in this manner leads to lower costs, shortened process and plating times, and increased production throughput compared to conventional processes for creating the hermetically sealed TVs in substrates.
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