MICROPLASMA JET DEVICE, LAMINATED MICROPLASMA JET MODULE AND METHOD FOR MANUFACTURING MICROPLASMA JET DEVICE
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Jul 28, 2016
app pub date -
Oct 1, 2014
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Oct 1, 2014
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Abstract
A microplasma jet device, according to the present invention, comprises: a channel layer having a plurality of micro flow channels arranged in parallel so as to enable a gas for generating plasma to pass therethrough; a first insulating layer joined to one surface of the channel layer and having a first plasma generation electrode; and a second insulating layer joined to the other surface of the channel layer and having a second plasma generation electrode.
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