Epitaxial Channel Transistors and Die With Diffusion Doped Channels

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20160211346A1
SERIAL NO

15082926

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Abstract

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Semiconductor structures can be fabricated by implanting a screen layer into a substrate, with the screen layer formed at least in part from a low diffusion dopant species. An epitaxial channel of silicon or silicon germanium is formed above the screen layer, and the same or different dopant species is diffused from the screen layer into the epitaxial channel layer to form a slightly depleted channel (SDC) transistor. Such transistors have inferior threshold voltage matching characteristics compared to deeply depleted channel (DDC) transistors, but can be more easily matched to legacy doped channel transistors in system on a chip (SoC) or multiple transistor semiconductor die.

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Patent Owner(s)

Patent OwnerAddress
MIE FUJITSU SEMICONDUCTOR LIMITED2000 MIZONO TADO-CHO KUWANA MIE 511-0118

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ranade, Pushkar Los Gatos, US 126 1886
Shifren, Lucian San Jose, US 139 2262
Thompson, Scott E Gainesville, US 64 1047

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