UPPER HEAT SHIELDING BODY, INGOT GROWING APPARATUS HAVING THE SAME AND INGOT GROWING METHOD USING THE SAME
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United States of America Patent
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Issued Date -
Jul 21, 2016
app pub date -
Aug 19, 2014
filing date -
Aug 27, 2013
priority date (Note) -
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Abstract
Provided is an ingot growing apparatus. The ingot growing apparatus for growing an ingot from a silicon melt received in a crucible by using a seed includes a chamber providing a space in which a series of processes for growing the ingot is performed, the crucible disposed within the chamber, a heating unit disposed outside the crucible, a seed chuck fixing the seed, an elevation unit connected to the seed chuck; and an upper heat shielding body disposed above the crucible, the upper heat shielding body having a hole through which the grown ingot passes, wherein the hole is adjustable in size.
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