PRODUCTION APPARATUS FOR CARBON NANOTUBES, FEED UNIT FOR BEING PART OF PRODUCTION APPARATUS, AND PRODUCTION METHOD FOR CARBON NANOTUBES
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Aug 28, 2014
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Aug 28, 2013
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Abstract
The invention shows a production apparatus (10) for producing carbon nanotubes by the gas-phase catalysis process, comprising: a first chamber (14) having a growth region that is a region in which carbon nanotubes are formed; a first temperature adjustment device (16, 18) capable of adjusting a temperature of the growth region in the first chamber (14); a pressure adjustment device (23, 24) capable of adjusting a pressure in the first chamber (14); a first feed device (30) capable of feeding a carbon source to the growth region in the first chamber (14); and a first vaporization device (including heater (31B)) capable of vaporizing a liquid (L) disposed in the production apparatus (10), wherein the first vaporization device (including heater (31B)) can vaporize the liquid (L) so that at least one kind of gas-phase catalyst is fed to the growth region in the first chamber (14).
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