GAS-DISCHARGE LASER POWER AND ENERGY CONTROL
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United States of America Patent
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Issued Date -
Jul 14, 2016
app pub date -
Jan 4, 2016
filing date -
Jan 9, 2015
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Abstract
The present disclosure is directed to simultaneously controlling peak pulse power and pulse energy in gas-discharge lasers. In an aspect, a radio-frequency power supply that is coupled to a gas-discharge laser is turned ON to initiate delivery of a laser pulse. The radio-frequency power supply is modulated ON/OFF to maintain the amplitude of the laser pulse at about a desired or prescribed value. Further, the radio-frequency power supply is turned OFF to terminate delivery of the laser pulse when the accumulated energy reaches reached a predefined energy threshold value.
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