THIN-FILM TRANSISTOR SUBSTRATE AND METHOD FOR FABRICATING THE SAME

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United States of America Patent

APP PUB NO 20160204126A1
SERIAL NO

14913464

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Abstract

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A TFT substrate includes: a substrate; a gate electrode above the substrate; an oxide semiconductor layer above the substrate; a gate insulating film between the gate electrode and the oxide semiconductor layer; a source electrode and a drain electrode which are connected to the oxide semiconductor layer; oxide films on the surface of the source electrode and the surface of the drain electrode, respectively; a first protective film covering the oxide films; a first interconnect layer connected to the source electrode and the drain electrode via respective first contact holes extending through the first protective film and the oxide films; wherein the source electrode and the drain electrode are each a laminated film including a Cu film and a Cu—Mn alloy film formed on the Cu film.

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Patent Owner(s)

Patent OwnerAddress
JOLED INCCHIYODA-KU TOKYO 101-0054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
AMANO, Kuniaki Hyogo, JP 3 25

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