DIGITALIZATION OF ANALOG MFC CONTROL INPUT
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United States of America Patent
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Jul 14, 2016
app pub date -
Jan 14, 2015
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Jan 14, 2015
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Abstract
A mass flow controller and method are described. The mass flow controller comprises: an analog signal input configured to receive an analog set point signal; a converter configured to convert the analog set point signal to a digital set point signal; and a source of at least one exact non-changing digital set point signal precisely representing a desired rate of flow; wherein the source provides the exact non-changing digital set point signal in response to the digital set point signal so long as the digital set point signal is within a preselected band defining a range of values.
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